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发明名称
Filtration module
摘要
申请公布号
EP1498169(B1)
申请公布日期
2010.06.16
申请号
EP20040007588
申请日期
1999.09.28
申请人
ENTEGRIS, INC.
发明人
STANKOWSKI, RALPH, J.;MILCETICH, JOHNN, L.
分类号
B01D35/30;B01D27/08;B01D29/21;B01D46/00;B01D46/24;B01D63/06;B01D65/00
主分类号
B01D35/30
代理机构
代理人
主权项
地址
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