| 摘要 |
<p>Provided is a transfer apparatus, which is free from the problem of contamination of a vacuum apparatus due to grease or dust, and which needs a small area for its installation and can be easily subjected to an anti-corrosion treatment by the existing technique. The transfer apparatus (1) comprises a transfer unit (21) for supporting and transferring a transfer object (20), a link (16) for transferring the power from an apparatus body portion (2) to the transfer unit (21) thereby to move the transfer unit (21) in a horizontal plane direction, and a guide mechanism (30) arranged between the apparatus body portion (2) and the transfer unit (21) for guiding the moving direction of the transfer unit (21). The guide mechanism (30) includes first and second hinged guide arms (31 and 32). In the guide mechanism (30), the first guide arm (31) on one end side is attached to the apparatus body portion (2), and the second guide arm (32) on the other end side is attached to the transfer unit (21). The first and second guide arms (31 and 32) are so constituted as to turn individually in vertical plane directions.</p> |
