发明名称 ISOTOPE DIAMOND LAMINATE
摘要 <p>The present invention aims at providing a high performance device that is not restricted by the current concept of a super-lattice and can overcome or loosen limitations on physical properties of materials and various problems related to hetero-junction, and achieves an isotope diamond layered body formed by layering of 12 C diamond film and 13 C diamond film by epitaxially growing the 12 C diamond film and the 13 C diamond film.</p>
申请公布号 EP2196564(A1) 申请公布日期 2010.06.16
申请号 EP20080834751 申请日期 2008.10.03
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY 发明人 WATANABE, HIDEYUKI;NEBEL, CHRISTOPH;SHIKATA, SHINICHI
分类号 C30B29/04;C23C16/27;H01L21/205 主分类号 C30B29/04
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