发明名称 |
ISOTOPE DIAMOND LAMINATE |
摘要 |
<p>The present invention aims at providing a high performance device that is not restricted by the current concept of a super-lattice and can overcome or loosen limitations on physical properties of materials and various problems related to hetero-junction, and achieves an isotope diamond layered body formed by layering of 12 C diamond film and 13 C diamond film by epitaxially growing the 12 C diamond film and the 13 C diamond film.</p> |
申请公布号 |
EP2196564(A1) |
申请公布日期 |
2010.06.16 |
申请号 |
EP20080834751 |
申请日期 |
2008.10.03 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY |
发明人 |
WATANABE, HIDEYUKI;NEBEL, CHRISTOPH;SHIKATA, SHINICHI |
分类号 |
C30B29/04;C23C16/27;H01L21/205 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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