发明名称 |
METHOD OF FORMING A CERAMIC SILICON OXIDE TYPE COATING, METHOD OF PRODUCING AN INORGANIC BASE MATERIAL, AGENT FOR FORMING A CERAMIC SILICON OXIDE TYPE COATING, AND SEMICONDUCTOR DEVICE |
摘要 |
A method of forming a ceramic silicon oxide type coating and a method of producing an inorganic base material having this coating, by coating an organohydrogensiloxane/hydrogensiloxane copolymer on the surface of an inorganic base material and converting the coating into a ceramic silicon oxide type coating by heating to high temperatures in an inert gas or an oxygen-containing inert gas (oxygen gas less than 20 volume %). A coating-forming agent comprising an organohydrogensiloxane/hydrogensiloxane copolymer or its solution. A semiconductor device comprising at least a semiconductor layer formed on a silicon oxide type coating on an inorganic substrate. |
申请公布号 |
EP2195398(A2) |
申请公布日期 |
2010.06.16 |
申请号 |
EP20080836003 |
申请日期 |
2008.10.03 |
申请人 |
DOW CORNING TORAY CO., LTD.;DOW CORNING CORPORATION |
发明人 |
HARIMOTO, YUKINARI;MICHINO, TETSUYUKI;KATSOULIS, ELIAS, DIMITRIS;KUSHIBIKI, NOBUO;SUTO, MICHITAKA |
分类号 |
C09D183/04;C09D183/05;C23C18/12;H01L21/02;H01L21/312;H01L21/316;H01L31/0216 |
主分类号 |
C09D183/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|