Semiconductor structure comprising an electrically conductive feature and method of forming a semiconductor structure

摘要

A semiconductor structure (300) comprises a semiconductor substrate (301). A layer of an electrically insulating material (304) is formed over the semiconductor substrate (301). An electrically conductive feature (312) is formed in the layer of electrically insulating material (304). A first layer of a semiconductor material (320) is formed between the electrically conductive feature (312) and the layer of electrically insulating material (304).