| 摘要 |
A polishing liquid for metals which comprises a metal-oxide-dissolving agent, a metal-oxidizing agent, a metal anticorrosive, a water-soluble polymer having a weight-average molecular weight of 8,000 or higher and having an anionic functional group and a nonionic functional group, and water and which has a pH of 2.5-5.0. The polishing liquid for metals is effective in reducing the frictional force in polishing which generates during CMP, and is highly effective in flattening the surface of a work to be polished.
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