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发明名称
DARK FIELD DETECTION APPARATUS WITH TRAVELING LENS MULTI-BEAM SCANNER AND A METHOD THEREOF
摘要
申请公布号
EP1490670(A4)
申请公布日期
2010.06.16
申请号
EP20030713910
申请日期
2003.03.14
申请人
APPLIED MATERIALS ISRAEL LTD.
发明人
NAFTALI, RON;REINHORN, SILVIU
分类号
G01B11/30;G01N21/89;G01N21/95;G01N21/956;H01L21/66;(IPC1-7):G01N21/00;G02B21/00;G01N21/88
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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