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发明名称
SUBSTRATE TREATING APPARATUS AND TREATING GAS EMITTING MECHANISM
摘要
申请公布号
KR100964042(B1)
申请公布日期
2010.06.16
申请号
KR20077028017
申请日期
2007.03.30
申请人
发明人
分类号
C23C16/455;H01L21/31
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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