VERFAHREN ZUR ERKENNUNG VON DEFEKTEN ELEKTRODEN IN EINER MIKROELEKTRODENMATRIX

摘要

The method involves measuring an electrochemical impedance spectrum for electrodes (1). The spectrum is modeled by an implicit non-integral frequency model in the form of a parameter matrix. Principal components analysis of the matrix is performed for transforming the matrix into a final matrix with decorrelated variables. The distance between electrode and a reference point is calculated and compared with a preset threshold distance. The electrodes with distance greater than the threshold distance classified as defective.