CASSETTE SYSTEM FOR STORING THE SUBSTRATE

摘要

PURPOSE: A cassette system for storing a substrate is provided to reduce costs without using a robot for a loading and drawing the substrate. CONSTITUTION: A cassette system for storing a substrate includes a cassette housing and a plurality of support bar units(120). A plurality of support bar units respectively has a plurality of support bars and is combined and laminated along the height direction inside the cassette housing. A driving loader(140) mutually approach or separate the plurality of support bars. The driving loader is inputted to the inside of the cassette housing on at least one of both regions of the cassette for storing the substrate and transfers the substrate on the support bar unit to the outside or transfers the substrate from the outside to the support bar unit.