发明名称 Quantum dot array and production method therefor, and dot array element and production method therefor
摘要 The present invention is a method of manufacturing a quantum dot array having a plurality of columnar parts including a quantum dot on a substrate, the method comprising the steps of obliquely vapor-depositing a material constituting a first barrier layer to become an energy barrier against the quantum dot onto a surface of the substrate, so as to form a plurality of first barrier layers; obliquely vapor-depositing a material constituting the quantum dot with respect to the surface of the substrate, so as to form the quantum dots on the first barrier layers; and obliquely vapor-depositing a material constituting a second barrier layer to become an energy barrier against the quantum dot with respect to the surface of the substrate, so as to form the second barrier layers on the quantum dots.
申请公布号 US7737046(B2) 申请公布日期 2010.06.15
申请号 US20050791445 申请日期 2005.11.24
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 TAKEDA YASUHIKO;MOTOHIRO TOMOYOSHI
分类号 H01L21/469 主分类号 H01L21/469
代理机构 代理人
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