APPARATUS FOR TREATMENT OF PLURAL SUBSTRATES

摘要

PURPOSE: An apparatus for processing a plurality of substrates is provided to improve yield by not re-controlling a transfer distance by including a fixing block which fixes a distance between a process chamber and a base frame. CONSTITUTION: A process chamber(120) receives a substrate transferred from a transfer chamber(110). The process chamber is connected to control the space with the transfer chamber by a space controller(150) in a thermal expansion process. A base frame(130) supports the process chamber on the lower side of the process chamber. A fixing block(140) is formed on the lower side of the process chamber and fixes the process chamber and the base frame therebetween.