发明名称 Methods and systems for semiconductor testing using reference dice
摘要 Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted.
申请公布号 US7737716(B2) 申请公布日期 2010.06.15
申请号 US20080346129 申请日期 2008.12.30
申请人 OPTIMALTEST LTD. 发明人 BALOG GIL
分类号 G01R31/26 主分类号 G01R31/26
代理机构 代理人
主权项
地址