| 摘要 |
A micro-machined switching system for equalizing an electrical property, such as charge due to parasitic capacitance formed at an input and an output of a micro-machined switching device. The micro-machined switching device may be a MEMS relay or a MEMS switch. In addition to the micro-machined switching device, the switching system also includes a balancing module for equalizing the electrical property between the input and the output of the micro-machined switching device. In certain embodiments, the balancing module includes a switch operable in a first state causing charge due to the parasitic capacitance on the input and the output of the micro-machined switching device to substantially balance. The switch is also operable in a second state wherein parasitic capacitance can separately accumulate at the input and the output of the micro-machined switching device.
|
