Method for moving wafer from arbitrary retaining position to standard filling position, involves correcting path of gripper by control processor with respect to evaluated image so that workpiece is transferred to correct position

摘要

The method involves controlling guidance of a gripper (2) of a robot (1) e.g. delta robot, on a path between an arbitrary retaining position and a standard filling position at an image recording region of an matrix camera (7a). A workpiece (9) and the gripper are imaged by the camera during guidance of the gripper. The image is evaluated by an evaluation device with respect to position and rotation of the workpiece. The path of the gripper is corrected by a control processor (8) with respect to the evaluated image so that the workpiece is transferred to a correct position. An independent claim is also included for a device for moving a dimensionally stable workpiece from an arbitrary retaining position to a standard filling position.