发明名称 Carbon nanotube transistor fabrication
摘要 During fabrication of single-walled carbon nanotube transistor devices, a porous template with numerous parallel pores is used to hold the single-walled carbon nanotubes. The porous template or porous structure may be anodized aluminum oxide or another material. A gate region may be provided one end or both ends of the porous structure. The gate electrode may be formed and extend into the porous structure.
申请公布号 US7736943(B2) 申请公布日期 2010.06.15
申请号 US20070870872 申请日期 2007.10.11
申请人 ETAMOTA CORPORATION 发明人 TOMBLER, JR. THOMAS W.;LIM BRIAN Y.
分类号 H01L21/44 主分类号 H01L21/44
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