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经营范围
发明名称
Scraping Chamber
摘要
申请公布号
KR100962485(B1)
申请公布日期
2010.06.14
申请号
KR20080062954
申请日期
2008.06.30
申请人
发明人
分类号
H01L21/324;H01L21/02
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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