| 摘要 |
PURPOSE: A vacuum gate valve is provided to prevent a sealing member from being cooled by preventing contact between the sealing member and external air. CONSTITUTION: A vacuum gate valve comprises a valve body(10), a valve plate(30), a valve plate driving unit(20), a sealing member, and a sealing member driving unit. A sliding space is formed in the valve body vertically to the fluid passage. The valve plate moves forward and backward inside the sliding space to open and close the fluid passage. The sealing member opens and closes the sliding space by moving up and down in parallel with the fluid passage. The sealing member driving unit comprises multiple actuators.
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