A ATOM-MICROSCOPE USING SURFACE ANALYSIS MEASUREMENT BASED ON FLOWING RESISTANCE OF FLUID

摘要

PURPOSE: A surface analysis method of measurement based on flow resistance of fluid and an atomic force microscope using the same are provided to enable a user to easily and simply obtain topography of a sample. CONSTITUTION: A driver(140) receives a signal of compression sensor. The driver moves a stage which sample is placed in XYZ direction to operate adjustment and operate scanning interval between end part which a fluid is sprayed form a nozzle and surface of a sample. A output unit(150) displays the operation value of the driver as a brightness on a computer monitor. The output unit obtains shape of surface of the sample, roughness of a part, cross sectional view, three dimensional diagram, and all kinds of statistics.