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发明名称
MAGNETRON SPUTTERING APPARATUS
摘要
申请公布号
KR100963413(B1)
申请公布日期
2010.06.14
申请号
KR20080013079
申请日期
2008.02.13
申请人
发明人
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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