Device and method for removing silicon particle of wafer,申请号KR20080129862-传众专利搜索

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发明名称	Device and method for removing silicon particle of wafer
摘要
申请公布号	KR100962479(B1)	申请公布日期	2010.06.14
申请号	KR20080129862	申请日期	2008.12.19
申请人		发明人
分类号	H01L21/302;H01L21/02;H01L21/301;H01L21/304	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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