APPARATUS FOR SUPPLYING CHEMICALS

摘要

PURPOSE: A chemical solution supplying apparatus is provided to reduce flow hunting and a pulsation on a chemical solution discharge nozzle terminal without adding a separate element by controlling the pressure of the chemical solution. CONSTITUTION: A chemical solution discharge nozzle(130) discharges the chemical solution. The chemical solution discharge nozzle includes a pressure measurement unit(131). A pressure measurement unit measures an intake pressure of the chemical solution on the chemical solution discharge nozzle. A pump(151) controls the supply of the chemical solution to the chemical solution discharge nozzle by receiving the pressure of the chemical solution from the chemical solution discharge nozzle. The pump controls the pressure of the chemical solution provided according to the measured intake pressure by the pressure measurement unit.