SUBSTRATES TRANSFER MEMBER, SUBSTRATES TREATING APPARATUS HAVING THE SAME AND METHOD OF TRANSFERRING SUBSTRATES USING THE SAME

摘要

PURPOSE: A substrate transfer member, a substrate processing apparatus having the same and a substrate transfer method using the same are provided to improve a productivity with shortening process time by controlling a horizontal movement speed of a hand according to an object loading or drawing the substrate. CONSTITUTION: A hand(520) loads a substrate. A hand driving unit(510) horizontally moves the hand. The hand driving unit controls a horizontal movement speed of a hand according to the object loading or drawing the substrate settled on the hand. A rotating unit(530) is installed under the hand driving unit. A vertical moving unit(540) is installed under the rotating unit. A horizontal moving unit(550) is installed under the vertical moving unit.