| 摘要 |
PURPOSE: A nesting table of a semiconductor equipment is provided to improve a productivity with combining a turn table of a metal and a plastic nest. CONSTITUTION: A pair of nest seating recesses is formed on a turn table(400) to a horizontal direction. A nest of a plastic(420) is settled on the nest seating recess. Material seating recesses arrange materials in the nest of a constant position. A penetrated hole is formed on a center position of the material seating recesses. The nest is fixed to a bolt(430) on the turn table. |
