| 摘要 |
PROBLEM TO BE SOLVED: To provide an absorption type multilayer film ND filter having an oxide dielectric film layer having the uniform thickness and a metallic absorption film layer having density distribution (width) narrower in the gradation density distribution than before, and a simple method of manufacturing the same. SOLUTION: The thickness of the oxide dielectric film layer is made uniform and the film thickness density distribution is applied only to the metallic absorption film layer in a film transportation direction and vertical direction by using a sputtering roll coater and arranging, against a band-like resin film substrate 2 transported along an outer peripheral surface of a can roll, a shielding mask 8 having an opening part parallel to the film transportation direction only on the front surface of a target 6 for forming the metallic absorption film layer. COPYRIGHT: (C)2010,JPO&INPIT |
