发明名称 ELECTROLYTIC ETCHING METHOD AND METHOD OF PRODUCING A SOLAR BATTERY
摘要 The present invention relates to a method and apparatus for partial etching or pattern etching using an electrolysis reaction, wherein, conventionally, there was the problem that an etching line could not be finely formed on a cell edge because of apparatus problems concerning alignment accuracy. The present invention provides a method and apparatus with which fine line etching is possible and which can form a line on a cell edge. Provided is a an electrolytic etching method of a substrate which is formed having a subject etching layer on a surface, having the steps of providing a fixed gap from a substrate end surface which is external to an end surface of the substrate for placing a working part of a working electrode and passing current between the substrate and the working electrode.
申请公布号 US2010140104(A1) 申请公布日期 2010.06.10
申请号 US20100707430 申请日期 2010.02.17
申请人 CANON KABUSHIKI KAISHA 发明人 MURAKAMI TSUTOMU;TSUZUKI KOJI
分类号 C25F3/02;C25F3/12;B23H3/00;B23H3/04;B23H5/00;C25F3/14;C25F7/00;H01L21/3063;H01L31/042;H01L31/18 主分类号 C25F3/02
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