| 摘要 |
PROBLEM TO BE SOLVED: To provide a color filter surface inspection machine provided in a conveyance system between an application device 12 and an exposure device 13, capable of total inspection by shortening a time required for inspection. SOLUTION: A conveyance roller 33 provided in the color filter surface inspection machine is used for reception of a glass substrate 1 from a conveyance route using a conveyance roller 53 into the color filter surface inspection machine 40, and for transfer of the glass substrate from the color filter surface inspection machine onto the conveyance route. The conveyance roller is provided in a roller unit 30, and is evacuated out of the conveyance route during inspection. A plurality of imaging cameras 44 are provided, to thereby image an effective area 1a on the glass substrate to be divided simultaneously. COPYRIGHT: (C)2010,JPO&INPIT |
