发明名称 |
SULFONIUM SALT, ACID GENERATOR, RESIST COMPOSITION, PHOTOMASK BLANK, AND PATTERNING PROCESS |
摘要 |
A sulfonium salt has formula (1) wherein R1 is a monovalent hydrocarbon group except vinyl and isopropenyl, R2, R3, and R4 are alkyl, alkenyl, oxoalkyl, aryl, aralkyl or aryloxoalkyl or may bond together to form a ring with the sulfur atom, and n is 1 to 3. A chemically amplified resist composition comprising the sulfonium salt is capable of forming a fine feature pattern of good profile after development due to high resolution, improved focal latitude, and minimized line width variation and profile degradation upon prolonged PED.
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申请公布号 |
US2010143830(A1) |
申请公布日期 |
2010.06.10 |
申请号 |
US20090630559 |
申请日期 |
2009.12.03 |
申请人 |
OHASHI MASAKI;KINSHO TAKESHI;WATANABE SATOSHI;OHSAWA YOUICHI |
发明人 |
OHASHI MASAKI;KINSHO TAKESHI;WATANABE SATOSHI;OHSAWA YOUICHI |
分类号 |
G03F1/00;C07C69/753;C07C69/76;C07C309/12;C07C381/12;C07J3/00;G03F7/004;G03F7/038;G03F7/039;G03F7/20;H01L21/027 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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