| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating electrode for restraining a joint part with a metal body and a ceramic body from being corroded, for example, by discharge of a metal body or exhaust gas, and further, capable firmly jointing between the metal body and the ceramic body, as well as a plasma reactor. <P>SOLUTION: The plasma generating electrode 1 includes at least two unit electrodes 4 each containing a ceramic body 2 and a metal body 3 so as to face the metal bodies 3 with each other, and is enabled to generate plasm between the unit electrodes 4 by impressing voltage between them 4. By diffusing metal atoms of the metal bodies 3 to the ceramic bodies 2, the metal bodies 3 and the ceramic bodies 2 are jointed. <P>COPYRIGHT: (C)2010,JPO&INPIT |
