| 摘要 |
PURPOSE: An apparatus for setting an air knife and an apparatus for processing a substrate including the same are provided to improve a production process with reduced cost and time by efficiently setting the air knife which blocks a processing liquid on the substrate. CONSTITUTION: A polygon column(320) is formed on a supporting plate(310). The polygon column includes one side(d) which forms a pre-set angle(a) with the supporting plate. A plurality of air knives is formed inside of a processing chamber. The air knives are formed to block a processing liquid on the substrate. A thickness of the supporting plate is interval between the substrate and the air knives.
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