| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase the speed of a substrate recovery operation, in relation to a substrate transport device. <P>SOLUTION: This substrate transport device is provided with: a substrate holding means 11 to mount a substrate 10 thereon; a suction means 15 for sucking and holding the substrate to the substrate holding means; a pressurization means 16 for detaching the substrate from the substrate holding means 11; a drive means 19 to drive the substrate holding means; a control means 12 to control the suction means 15, the pressurization means 16 and the drive means 19 to slide and move the substrate 10 from the substrate holding means 11; a substrate recovery means 32 to recover the sliding and moving substrate from the substrate holding means; and a restriction means 17 to restrict the position of the moving substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
