| 摘要 |
PROBLEM TO BE SOLVED: To solve problems such as the problem that a conventional workpiece washing and drying apparatus requires many nozzles because of its treatment structure in which many water washing and drying nozzles aim at many washing and drying points of workpieces, which causes complication of a washing apparatus, nozzles, piping, etc., complication of maintenance and administration, the enlargement, complication., etc., of equipment and the problem of complication, enlargement, etc., of the washing and drying apparatus. SOLUTION: A workpiece washing apparatus is constituted from a plurality of stations, a turn table provided with a shielding door and sending workpieces in turn, an upper surface washing and drying apparatus provided with upper surface washing and drying nozzles planetarily moving by rotation and revolution and formed in washing and drying positions, a side surface washing and drying apparatus provided with a pair of side surface washing and drying nozzles planetarily moving by revolution and rotation by the rotation of the upper surface washing and drying apparatus, a lower surface washing and drying apparatus provided with a lower surface washing and drying nozzles planetarily moving by rotation and revolution, and a water or air feeding means. COPYRIGHT: (C)2010,JPO&INPIT |
