| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning device which can improve the efficiency in the cleaning of the object to be cleaned, and to provide a cleaning method using the cleaning device. Ž<P>SOLUTION: The cleaning device includes: a cleaning tank 3 where cleaning water 1 admixed with an additive suppressing the joining of fine bubbles 4 each other is stored, further, the object 2 to be cleaned is inserted to the inside, and the object 2 to be cleaned is immersed into the cleaning water 1; a first bubble jetting means 5 jetting the fine bubbles 4 to the cleaning water 1 in the cleaning tank 3, and cleaning the object 2 to be cleaned; and an ultrasonic emission means 6 emitting ultrasonic waves to the cleaning water 1 in the cleaning tank 3, and cleaning the object 2 to be cleaned; wherein the first bubble jetting means 5 has a bubble generator 7 generating the fine bubbles 4, and the ultrasonic emission means 6 includes an ultrasonic vibrator 11 radiating ultrasonic waves. The device is further provided with a bubble movement suppression means 17 suppressing the movement of the fine bubbles 4 toward the ultrasonic vibrator 11. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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