| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the sensitivity of an optical sensor without requiring a new film layer. Ž<P>SOLUTION: A method of manufacturing an optical sensor element manufacturing an optical sensor element arranged in a display panel having a light source includes a first light shield film vapor-deposition step of vapor-depositing a first light shield film which has a slower etching rate on an upper surface of a substrate, a second light shield film vapor-deposition step of vapor-depositing a second light shield film which has a faster etching rate on an upper surface of the first light shield film, a resist pattern formation step of forming a resist pattern on an upper surface of the second light shield film, a wet etching step of subjecting the first and second light shield films to wet etching, a resist pattern peeling step of peeling the resist pattern from the second light shield film, a base coat vapor-deposition step of vapor-depositing a base coat to cover the glass substrate and the first and second light shield films, and a semiconductor layer vapor-deposition step of vapor-depositing a semiconductor layer on an upper surface of the base coat below which the first and second light shield films are arranged. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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