| 发明名称 |
ENCODER SENSOR FOR VACUUM, AND MOTOR FOR VACUUM INCLUDING SAME |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To acquire a higher vacuum degree by baking, in an encoder sensor for vacuum. <P>SOLUTION: This encoder sensor for vacuum wherein a magnetoresistance effect element 11 to which a lead terminal 14 is connected and a permanent magnet 15 are fixed by a sealing resin 16 into a sensor case 17, includes a buffer resin layer 1 having a pencil hardness of 3H or lower on at least either of (1) a boundary part between the sensor case 17 and the sealing resin 16 and (2) a boundary part between the lead terminal 14 and the sealing resin 16. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| 申请公布号 |
JP2010127756(A) |
申请公布日期 |
2010.06.10 |
| 申请号 |
JP20080302515 |
申请日期 |
2008.11.27 |
| 申请人 |
YASKAWA ELECTRIC CORP;MURATA MFG CO LTD |
发明人 |
OGUMA KIYONORI;HAMAO SATOKAZU;FURUKAWA NOBUMASA;NOGUCHI TADATAKA;TOMAKI KENJI;NAKAMURA YORIHISA;UEDA MASAYA |
| 分类号 |
G01D5/245;G01B7/30;G01P1/02;G01P3/488;H01L43/02;H01L43/08;H02K11/00 |
主分类号 |
G01D5/245 |
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