DLC FILM, DLC COATING MEMBER, AND METHOD FOR PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a DLC film which is robust, has uniform thickness, has a fine indented surface and enables significant frictional reduction, and to provide a DLC coating member provided with the above DLC film and methods for production thereof. SOLUTION: The DLC film is coated on the surface of a substrate which has preferably a hardness of Hv 100 to 800 and is provided with the smooth surface with a centerline average roughness Ra of <0.01μm. After that, the fine particles comprising preferably a ceramic material having the grain size of≤100μm are projected and collided at high speed on the surface of the DLC film to form the fine asperity having the centerline average roughness Ra of 0.01 to 0.2μm thereon. COPYRIGHT: (C)2010,JPO&INPIT