发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME |
摘要 |
<p>A semiconductor device is provided with: a first interlayer insulating film (10) formed on a semiconductor substrate; a second interlayer insulating film (14) formed on the first interlayer insulating film (10); and first wiring (21) formed on an upper region of the second interlayer insulating film (14). The second interlayer insulating film (14) is composed of a porous region (14B) including holes (14b), and a non-porous region (14A). The porous region (14B) is formed at a region positioned on the circumference of the first wiring (21) on the second interlayer insulating film (14). The non-porous region (14A) is formed at least between the first interlayer insulating film (10) and the porous region (14B).</p> |
申请公布号 |
WO2010064346(A1) |
申请公布日期 |
2010.06.10 |
申请号 |
WO2009JP04507 |
申请日期 |
2009.09.10 |
申请人 |
IWASAKI, AKIHISA;PANASONIC CORPORATION |
发明人 |
IWASAKI, AKIHISA |
分类号 |
H01L21/316;H01L21/768;H01L23/522 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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