发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 <p>A semiconductor device is provided with: a first interlayer insulating film (10) formed on a semiconductor substrate; a second interlayer insulating film (14) formed on the first interlayer insulating film (10); and first wiring (21) formed on an upper region of the second interlayer insulating film (14).  The second interlayer insulating film (14) is composed of a porous region (14B) including holes (14b), and a non-porous region (14A).  The porous region (14B) is formed at a region positioned on the circumference of the first wiring (21) on the second interlayer insulating film (14).  The non-porous region (14A) is formed at least between the first interlayer insulating film (10) and the porous region (14B).</p>
申请公布号 WO2010064346(A1) 申请公布日期 2010.06.10
申请号 WO2009JP04507 申请日期 2009.09.10
申请人 IWASAKI, AKIHISA;PANASONIC CORPORATION 发明人 IWASAKI, AKIHISA
分类号 H01L21/316;H01L21/768;H01L23/522 主分类号 H01L21/316
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