发明名称 |
METHOD AND APPARATUS FOR DUV TRANSMISSION MAPPING |
摘要 |
<p>Apparatus and method for transmittance mapping of an object which is at least partially transparent to deep ultraviolet radiation. The method comprises directing a wide-band deep ultraviolet radiation so as to illuminate different areas of an array of successive areas of the object; using an optical detector positioned on an opposite side of the object with respect to the radiation source detecting the wide-band deep ultraviolet radiation that emerges from the object; and processing signals from the optical detector to determine the transmittance of the radiation through the different areas of the array of successive areas of the object.</p> |
申请公布号 |
KR20100063003(A) |
申请公布日期 |
2010.06.10 |
申请号 |
KR20107003147 |
申请日期 |
2008.07.10 |
申请人 |
PIXER TECHNOLOGY LTD. |
发明人 |
BEN ZVI GUY;ZAIT EITAN;DMITRIEV VLADIMIR J.;LABOVITZ STEVEN M.;GRAITZER EREZ;SHARONI OFIR |
分类号 |
G03F7/20;G06K9/00;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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