| 摘要 |
This aims to improve the heat controllability of an evaporation container (9) of a vacuum-evaporation source. This vacuum-evaporation source (3) comprises the evaporation container (9) having an organic material (21) arranged therein, and a heater wire (18) wound on the outer circumference of the evaporation source (3). The organic material (21) is arranged such that its portion to contact the sidewall of the evaporation container (9) is below the lower end of the heater wire (18), and a substrate is attached to a substrate holder. When a power source (7) is started so that the heater wire (18) generates heat to heat the evaporation container (9), the vapor of the organic material (21) is released from an upward through hole (31) to the inside of a vacuum bath (2), so that it sticks to the substrate (20) thereby to form a thin film. The heater wire (18) is arranged up to the upper end of the evaporation container (9), so that it can heat the opening to an evaporation temperature or higher. The evaporation container (9) is made of a metal material selected from at least one kind of copper, an alloy of copper and beryllium, Ti and Ta, and is formed to have a side wall and a bottom wall of a thickness of 0.3 mm to 0.7 mm. Thus, the vacuum-evaporation source (3) has a small heat capacity and excellent controllability.
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