| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an automatic eccentricity adjusting stage which can automatically perform eccentricity adjustment during endless rotation, and can cope with fine drive. Ž<P>SOLUTION: The automatic eccentricity adjusting stage 10 includes: an XY stage 11 capable of adjusting a position in a horizontal direction constituted of an X-axis and a Y-axis orthogonal to each other; and a tilt stage 14 capable of adjusting swing and tilt in the horizontal direction, and includes: a rotating means 18 rotating at least one of the XY stage and the tilt stage while setting a vertical direction as an axis of rotation; driving means 13 and 16 arranged at the peripheries of the XY stage and the tilt stage and driving stage moving parts 11a and 14a of the XY stage and the tilt stage; fixing means 12 and 15 fixing the positions of the stage moving parts; and a suspension means allowing the stage moving parts to suspend relative to stage fixed parts 11b and 14b. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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