| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card where a contact exhibits a large elastic force without depending on the direction of the applying direction of an external force, and it is achieved by a simple structure, and to provide a method of manufacturing the probe card. Ž<P>SOLUTION: In the probe card 1, the contact 3 is formed in a dome shape, and a plurality of through grooves 3h formed from its top 3t to skirt 3r are arranged rotationally symmetrically. The probe card 1 is formed in a doughnut shape having an escape hole 4h, and has a first buffer member interposed between the skirt 3r of the contact 3 and a wiring board 2 inside the contact 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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