发明名称 |
Inspection method and apparatus for substrate |
摘要 |
An inspection method and apparatus for a substrate are provided. The inspection apparatus includes an optical unit generating a light illuminating the substrate to generate an image, a sensor array receiving the image having a light wave comprising a wave-band within a range between 700 nm to 1500 nm, and an image processing unit capturing the image.
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申请公布号 |
US2010142796(A1) |
申请公布日期 |
2010.06.10 |
申请号 |
US20080315699 |
申请日期 |
2008.12.05 |
申请人 |
CHANG JEN-MING;HSU MAU-HSIUNG;TSENG YEN-HSIN;HO GUO-CHENG;YANG HSUAN;YU CHIH-CHIEH;SHEN JIA-LIN;LIN JUI-YU |
发明人 |
CHANG JEN-MING;HSU MAU-HSIUNG;TSENG YEN-HSIN;HO GUO-CHENG;YANG HSUAN;YU CHIH-CHIEH;SHEN JIA-LIN;LIN JUI-YU |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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