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经营范围
发明名称
Vakuumverdampfungseinrichtung
摘要
申请公布号
DE69841645(D1)
申请公布日期
2010.06.10
申请号
DE19986041645
申请日期
1998.05.28
申请人
ULVAC INC.
发明人
NAGASHIMA, NAOKI;TAKAHASHI, NATSUKI;NEGISHI, TOSHIO
分类号
C23C14/12;B01B1/00;B01J19/24;B05D7/24;C23C14/24;C23C14/56
主分类号
C23C14/12
代理机构
代理人
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