APPARATUS FOR TREATING SUBSTRATE AND METHOD OF TRANSFERRING SUBSTRATE USING THE SAME

摘要

PURPOSE: An apparatus for processing a substrate and a method for transferring the substrate using the same are provided to prevent an operational accident when an operator is in the apparatus by transferring the substrate after checking a photo sensor and a door sensor. CONSTITUTION: A first roller conveyor(105) transfers a substrate(50). A cleaning processing unit(110) implements a cleaning process for the substrate. A rinsing processing unit(120) implements a rinse process for the cleaned substrate. A drying processing unit(130) implements a drying process for the rinsed substrate. A second roller conveyor discharges the dried substrate. An interface unit(140) receives the dried substrate and transfers the substrate to the second roller conveyor.