MANUFACTURING METHOD FOR DISPLAY DEVICE

摘要

PURPOSE: A manufacturing method of a display device for enhancing productivity with the low cost and high efficiency is provided to reduce the un-uniformity of silicon crystallization by using a mask and line beam. CONSTITUTION: An amorphous silicon is formed on a substrate(110). The substrate is arranged on the stage. A formed amorphous silicon is crystallized as a polycrystalline silicon by using the mask and the line beam. The line beam is formed by an IR(Infrared Ray) laser. The line beam is scanned in a right direction or left direction of X axis. The line beam is moved from upward and downward of the y-axis. The line beam is performed in a sequential scanning method.