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发明名称
Vorrichtung und Verfahren zur Säuberung von kontaminierten Oberflächen in einem Ionen-Implantierungsgerät
摘要
申请公布号
DE60044272(D1)
申请公布日期
2010.06.10
申请号
DE20006044272
申请日期
2000.05.08
申请人
AXCELIS TECHNOLOGIES INC.
发明人
BERNSTEIN, JAMES DAVID;KOPALIDIS, PETER MILTIADIS;FREER, BRIAN SCOTT
分类号
C23C14/00;H01J37/02;H01J37/317;H01L21/265
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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