| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate the difference in the detection sensitivity between two directions, without requiring much manufacturing time. <P>SOLUTION: An acceleration sensor includes: movable electrodes 4 and 5 in a rectangular shape; a pair of beam sections 6a and 6b and a pair of beam sections 7a and 7b, connected substantially at the centers of two opposing sides of each of the movable electrodes 4 and 5, to swayingly support the movable electrodes 4 and 5; fixed electrodes facing predetermined gaps, in between to one side and the other side of the surface of each of the movable electrodes 4 and 5, respectively, with respect to the straight lines connecting the pair of beam sections 6a and 6b and the beam sections 7a and 7b as border lines; recesses 11a(13a), 11b(13b), 11c(13c), and 11d(13d), and a recess 12(14), formed on one side and on the other side of the rear face of each of the movable electrodes 4 and 5, with respect to the straight lines connecting the pair of beam sections 6a and 6b and the beam sections 7a and 7b as border lines; and metallic materials 17 embedded in the recesses 12(14). <P>COPYRIGHT: (C)2010,JPO&INPIT |
