| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an interferometer system capable of obtaining an accurate speed of a moving body, a stage device, an exposure apparatus and a device manufacturing method. <P>SOLUTION: The system includes: a first wave guide part, having a first refractive index, fixed on a moving body; a second wave guide part having a second refractive index different from the first refractive index, fixed on the moving body; an interference part for causing a first electromagnetic wave passing through the first wave guide part, to interfere with a second electromagnetic wave passing through the second wave guide part, having the same wavelength as that of the first electromagnetic wave; a detecting device for detecting the phase difference between the first electromagnetic wave and the second electromagnetic wave, by using the interference wave generated in the interference part; and a speed-obtaining device for obtaining information regarding the moving speed of the moving body by using the sensed phase difference. <P>COPYRIGHT: (C)2010,JPO&INPIT |
