| 摘要 |
PROBLEM TO BE SOLVED: To provide an autofocus device solving the problems of throughput, sound at switching, and a service life. SOLUTION: The autofocus device includes an objective lens 11, an observation optical system 13, and a drive mechanism 16 that displaces the objective lens 11 in the optical axis direction. The device includes a lighting optical system optical passage 30 which emits light onto the measurement surface of an object to be measured via the objective lens 11, and a pattern projection optical system optical passage 40. The pattern projection optical system optical passage 40 is provided with an electronic control shutter 41, a pattern projection plate 43 on which a predetermined pattern is formed, and a projecting lens 45. COPYRIGHT: (C)2010,JPO&INPIT |
