| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a visual inspection method capable of detecting the flaw of an image, without waiting for the completion of the analysis of flaw and of preventing the deterioration of the inspection throughput, and to provide a visual inspection apparatus. Ž<P>SOLUTION: The image which is transmitted to the bank of the empty state of a memory for temporarily housing the inspection image of a substrate, on the basis of a preliminarily defined image acquisition order and an inspection target region, is housed to execute the detection of the flaw; the execution state of the detection of the flaw is monitored; the flow analysis is executed successively, starting from an image which is most advanced in the detection processing of the flaw; the image is eliminated from the bank and the bank is released; and the next image is housed in the bank. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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